Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining
基于体硅工艺的静电致动微夹持器制作工艺分析
A Micromachining Based Miniature Variable Optical Attenuator
超小型非硅基微机械可调光衰减器
Micromachining Technology with Bright Prospects
前程远大的微细加工技术
Mechanism, characteristic and application of excimer laser micromachining are introduced.
介绍了准分子激光微加工的机理，特点和应用。
Localization of Electrochemical Micromachining with Nanosecond Pulse Duration
纳秒级脉冲电流电解加工定域性的试验研究
A fabrication process has been developed to a polymer micro tip arrays using micromachining.
采用微加工工艺制备出一种聚合物微锥阵列。
Raman Online Measurement of Stress Resulting from Micromachining
微加工工艺应力的喇曼在线测量
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